Method for depositing a target material onto a sensitive material
The invention relates to a method for depositing a target material onto a sensitive material, which method comprises the steps of: - providing a substrate with a sensitive material, like an emissive electroluminescent layer; - creating a vapor plume of target material by a physical vapor deposition...
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| creator | Janssens, Jan Arnaud Dekkers, Jan Matthijn |
| description | The invention relates to a method for depositing a target material onto a sensitive material, which method comprises the steps of:
- providing a substrate with a sensitive material, like an emissive electroluminescent layer;
- creating a vapor plume of target material by a physical vapor deposition method;
- depositing a first layer of target material on the sensitive material, while maintaining the maximum particle velocity of the deposited particles below a preset value; and
- depositing a second layer of target material on the first layer of target material, while the maximum particle velocity of the deposited particles is above the preset value. The invention also relates to an intermediate product and to an organic light emitting diode. |
| format | Patent |
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- providing a substrate with a sensitive material, like an emissive electroluminescent layer;
- creating a vapor plume of target material by a physical vapor deposition method;
- depositing a first layer of target material on the sensitive material, while maintaining the maximum particle velocity of the deposited particles below a preset value; and
- depositing a second layer of target material on the first layer of target material, while the maximum particle velocity of the deposited particles is above the preset value. The invention also relates to an intermediate product and to an organic light emitting diode.</description><language>eng ; fre ; ger</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180425&DB=EPODOC&CC=EP&NR=2722412B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180425&DB=EPODOC&CC=EP&NR=2722412B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Janssens, Jan Arnaud</creatorcontrib><creatorcontrib>Dekkers, Jan Matthijn</creatorcontrib><title>Method for depositing a target material onto a sensitive material</title><description>The invention relates to a method for depositing a target material onto a sensitive material, which method comprises the steps of:
- providing a substrate with a sensitive material, like an emissive electroluminescent layer;
- creating a vapor plume of target material by a physical vapor deposition method;
- depositing a first layer of target material on the sensitive material, while maintaining the maximum particle velocity of the deposited particles below a preset value; and
- depositing a second layer of target material on the first layer of target material, while the maximum particle velocity of the deposited particles is above the preset value. The invention also relates to an intermediate product and to an organic light emitting diode.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHD0TS3JyE9RSMsvUkhJLcgvzizJzEtXSFQoSSxKTy1RyE0sSS3KTMxRyM8ryQcKF6fmgZSUpcJleBhY0xJzilN5oTQ3g4Kba4izhy7QtPjU4oLE5NS81JJ41wAjcyMjE0MjJ0NjIpQAAJy3MTk</recordid><startdate>20180425</startdate><enddate>20180425</enddate><creator>Janssens, Jan Arnaud</creator><creator>Dekkers, Jan Matthijn</creator><scope>EVB</scope></search><sort><creationdate>20180425</creationdate><title>Method for depositing a target material onto a sensitive material</title><author>Janssens, Jan Arnaud ; Dekkers, Jan Matthijn</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2722412B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2018</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>Janssens, Jan Arnaud</creatorcontrib><creatorcontrib>Dekkers, Jan Matthijn</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Janssens, Jan Arnaud</au><au>Dekkers, Jan Matthijn</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for depositing a target material onto a sensitive material</title><date>2018-04-25</date><risdate>2018</risdate><abstract>The invention relates to a method for depositing a target material onto a sensitive material, which method comprises the steps of:
- providing a substrate with a sensitive material, like an emissive electroluminescent layer;
- creating a vapor plume of target material by a physical vapor deposition method;
- depositing a first layer of target material on the sensitive material, while maintaining the maximum particle velocity of the deposited particles below a preset value; and
- depositing a second layer of target material on the first layer of target material, while the maximum particle velocity of the deposited particles is above the preset value. The invention also relates to an intermediate product and to an organic light emitting diode.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Method for depositing a target material onto a sensitive material |
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