ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING A DEVICE

An illumination optical system having high degree of freedom regarding change of polarization state. The illumination optical system for illuminating an illumination objective surface with light from a light source includes a first spatial light modulator which has a plurality of optical elements ar...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KATO Kinya, MIYAKE Norio
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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