High-efficient CMOS-compatible grating couplers with backside metal mirror

High-efficient CMOS-compatible grating couplers with backside metal mirror

The invention generally relates to grating couplers based on silicon-on-insulator technology. On the back side of the wafer membrane windows are etched extending to the buried oxide layer of the SOI wafer and a mirror layer is then deposited within the membrane windows on the back side of the buried...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BERROTH, MANFRED, BUTSCHKE, JOERG, SFAR ZAOUI, WISSEM, LETZKUS, FLORIAN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:The invention generally relates to grating couplers based on silicon-on-insulator technology. On the back side of the wafer membrane windows are etched extending to the buried oxide layer of the SOI wafer and a mirror layer is then deposited within the membrane windows on the back side of the buried oxide layer.