Method for producing a silicon single crystal
The method comprises inductively heating a silicon plate, melting granular silicon on the plate, and supplying molten silicon through a flow tube in a center of the plate to a phase boundary at which a single crystal of silicon is crystallized by inductively heating a ring of silicon before the indu...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The method comprises inductively heating a silicon plate, melting granular silicon on the plate, and supplying molten silicon through a flow tube in a center of the plate to a phase boundary at which a single crystal of silicon is crystallized by inductively heating a ring of silicon before the inductively heating the plate. The ring is located on the plate, and an outer diameter of the ring is smaller than an outer diameter of the plate, where the ring has a resistivity of greater than 1omega cm, and a specific resistance of the ring is smaller than the specific resistance of the plate. The method comprises inductively heating a silicon plate, melting granular silicon on the plate, and supplying molten silicon through a flow tube in a center of the plate to a phase boundary at which a single crystal of silicon is crystallized by inductively heating a ring of silicon before the inductively heating the plate. The ring is located on the plate, and an outer diameter of the ring is smaller than an outer diameter of the plate, where the ring has a resistivity of greater than 1omega cm, and a specific resistance of the ring is smaller than the specific resistance of the plate. An internal diameter of the ring is equal to an internal diameter of the flow tube. A thickness of the ring is smaller than a thickness of the plate.
Gegenstand der Erfindung ist ein Verfahren zum Herstellen eines Einkristalls aus Silizium, umfassend
das induktive Erhitzen einer Platte aus Silizium;
das Schmelzen von körnigem Silizium auf der Platte aus Silizium;
das Zuführen des geschmolzenen Siliziums durch ein Ablaufrohr im Zentrum der Platte zu einer Phasengrenze, an der ein Einkristall aus Silizium kristallisiert;
das induktive Erhitzen eines Rings aus Silizium vor dem induktiven Erhitzen der Platte, wobei der Ring auf der Platte liegt und einen kleineren spezifischen Widerstand als die Platte hat; und das Schmelzen des Rings. |
---|