Pressure sensor having flexible diaphragm with active circuit components thereon

A pressure sensor (100) includes a substrate (105) having a flexible diaphragm (107), and a differential amplifier including two or more transistors (110, 120, 130, 140) formed on the flexible diaphragm. Each of the two or more transistors may include a gate (112), a source (114) and a drain (116)....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BREZEANU, MIHAI, DUMITRU, VIOREL GEORGEL, COSTEA, STEFAN DAN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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