Pressure sensor having flexible diaphragm with active circuit components thereon

A pressure sensor (100) includes a substrate (105) having a flexible diaphragm (107), and a differential amplifier including two or more transistors (110, 120, 130, 140) formed on the flexible diaphragm. Each of the two or more transistors may include a gate (112), a source (114) and a drain (116)....

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Bibliographische Detailangaben
Hauptverfasser:	BREZEANU, MIHAI, DUMITRU, VIOREL GEORGEL, COSTEA, STEFAN DAN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A pressure sensor (100) includes a substrate (105) having a flexible diaphragm (107), and a differential amplifier including two or more transistors (110, 120, 130, 140) formed on the flexible diaphragm. Each of the two or more transistors may include a gate (112), a source (114) and a drain (116). In some cases, each of the two or more transistors may include a semiconductor layer and a piezoelectric layer, wherein the piezoelectric layer modulates an electric charge on the gate of the corresponding transistor based on the deflection of the flexible diaphragm. The electric charge may modulate the current that is passing through the corresponding transistors, which may cause the differential amplifier to produce an output that is representative of the applied input pressure.