Flow Sensor
Provided is a flow sensor including: a base made of glass; a substrate made of glass and disposed on an upper surface of the base; a flow velocity detection unit including an electrical resistance element, the flow velocity detection unit being disposed on an upper surface of the substrate; and an e...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; fre ; ger |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | Provided is a flow sensor including: a base made of glass; a substrate made of glass and disposed on an upper surface of the base; a flow velocity detection unit including an electrical resistance element, the flow velocity detection unit being disposed on an upper surface of the substrate; and an electrode that penetrates the substrate and is electrically connected to the electrical resistance element. |
|---|