CORDIERITE SINTERED BODY AND MEMBER FOR SEMICONDUCTOR DEVICE COMPOSED OF CORDIERITE SINTERED BODY

[Problem] To provide a cordierite sintered body having a low coefficient of thermal expansion and high specific rigidity (=Young's modulus/specific gravity) and mechanical strength, and to provide a member for a semiconductor device composed of this cordierite sintered body. [Solution] This cor...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SENO,HIROAKI, SHIGEOKA,TOSHIAKI, FURUSE,TATSUJI, OKAYAMA,KOUKI, IIDA,SHUICHI
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!