CORDIERITE SINTERED BODY AND MEMBER FOR SEMICONDUCTOR DEVICE COMPOSED OF CORDIERITE SINTERED BODY

[Problem] To provide a cordierite sintered body having a low coefficient of thermal expansion and high specific rigidity (=Young's modulus/specific gravity) and mechanical strength, and to provide a member for a semiconductor device composed of this cordierite sintered body. [Solution] This cor...

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Bibliographische Detailangaben
Hauptverfasser:	SENO,HIROAKI, SHIGEOKA,TOSHIAKI, FURUSE,TATSUJI, OKAYAMA,KOUKI, IIDA,SHUICHI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	[Problem] To provide a cordierite sintered body having a low coefficient of thermal expansion and high specific rigidity (=Young's modulus/specific gravity) and mechanical strength, and to provide a member for a semiconductor device composed of this cordierite sintered body. [Solution] This cordierite sintered body has a major crystalline phase of cordierite and contains alumina, mullite, and sapphirine as a secondary crystalline phase, an amorphous phase containing Ca being present at the grain boundary. The crystalline phase ratio of the major crystalline phase is 95-97.5 mass%. The crystalline phase ratio of the secondary crystalline phase is 2.5-5 mass%. The Ca content relative to the total, in terms of CaO, is 0.4-0.6 mass%.