MTJ sensoring including domain stable free layer
A magnetic field sensor having a domain stable free layer, comprising: an antiferromagnetic layer on a lower conductive layer; a pinned magnetic reference layer, having a magnetization direction, on said antiferromagnetic layer; a separation layer on said magnetic reference layer; a magnetic free la...
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Zusammenfassung: | A magnetic field sensor having a domain stable free layer, comprising:
an antiferromagnetic layer on a lower conductive layer;
a pinned magnetic reference layer, having a magnetization direction, on said antiferromagnetic layer;
a separation layer on said magnetic reference layer;
a magnetic free layer on said separation layer;
a capping layer on said magnetic free layer;
said magnetic reference, separation, free, and capping layers having the form of a plurality of independent sensor stacks, each such stack having, in plan view, a width dimension along a first axis and a length dimension along a second axis, with a length-to-width ratio sufficient to support an anisotropy field, and a length dimension no greater than a domain wall width and perpendicular to said pinned magnetization direction whereby all free layers of said sensor stacks are domain stable when exposed to a magnetic field;
said lower conductive layer having the form of a bottom electrode that is common to all said sensor stacks;
a dielectric layer that fills all space between said sensor stacks, including covering all sidewalls; and
a top electrode that contacts said capping layer whereby it is common to all said sensor stacks. |
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