HYDROGENATION OF ORGANOCHLOROSILANES AND SILICON TETRACHLORIDE
The invention relates to a process for preparing trichlorosilane, characterized in that hydrogen and at least one organic chlorosilane are reacted in a reactor which is operated under superatmospheric pressure and comprises one or more reactor tubes which consist of a gastight ceramic material.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention relates to a process for preparing trichlorosilane, characterized in that hydrogen and at least one organic chlorosilane are reacted in a reactor which is operated under superatmospheric pressure and comprises one or more reactor tubes which consist of a gastight ceramic material. |
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