PROCESS FOR PREPARING HYDRIDOSILANES

The present invention relates to a process for preparing hydridosilanes from halosilanes, in which a) i) at least one halosilane of the generic formula SinX2n+2 (where n 3 and X=F, Cl, Br and/or I) and ii) at least one catalyst are converted to form a mixture comprising at least one halosilane of th...

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Bibliographische Detailangaben
Hauptverfasser: WIEBER, STEPHAN, ZOELLNER, JOERG, KNIPPENBERG, UDO, SCHWAERTZKE, THORSTEN, HAUBROCK, JENS, BRAUSCH, NICOLE
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The present invention relates to a process for preparing hydridosilanes from halosilanes, in which a) i) at least one halosilane of the generic formula SinX2n+2 (where n 3 and X=F, Cl, Br and/or I) and ii) at least one catalyst are converted to form a mixture comprising at least one halosilane of the generic formula SimX2m+2 (where m>n and X=F, Cl, Br and/or I) and SiX4 (where X=F, Cl, Br and/or I), and b) the at least one halosilane of the generic formula SimX2m+2 is hydrogenated to form a hydridosilane of the generic formula SimH2m+2, the hydridosilane of the generic formula SimH2m+2 is separated from partially halogenated hydridosilanes of the general formula SimH(2m+2−y)Xy (where 1