ELECTRONIC CYCLOTRONIC RESONANCE ION SOURCE

An electron cyclotron resonance ion source device includes a plasma chamber configured to contain a plasma; a high-frequency system configured to transmit a high-frequency wave into the chamber; a magnetic field generator configured to generate a magnetic field in the chamber; an accelerating tube i...

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Bibliographische Detailangaben
Hauptverfasser: DELFERRIERE, Olivier, HARRAULT, Francis, TUSKE, Olivier
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An electron cyclotron resonance ion source device includes a plasma chamber configured to contain a plasma; a high-frequency system configured to transmit a high-frequency wave into the chamber; a magnetic field generator configured to generate a magnetic field in the chamber; an accelerating tube including an isolating structure and an extraction system, the magnetic field generator for generating a magnetic field being entirely located downstream of the isolating structure.