Image processing device and method for image processing

A control unit 211 shifts an imaging unit 12 relatively with respect to a stage 3 to take an image IM(1)-IM(6) of a measuring object W at a plurality of places by the imaging unit 12 and thereby obtain a plurality of images IM(1)-IM(6), and generates a composite image IMa of the measuring object W h...

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Hauptverfasser: Kawazoe, Masaru, Ariga, Kozo
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Sprache:eng ; fre ; ger
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creator Kawazoe, Masaru
Ariga, Kozo
description A control unit 211 shifts an imaging unit 12 relatively with respect to a stage 3 to take an image IM(1)-IM(6) of a measuring object W at a plurality of places by the imaging unit 12 and thereby obtain a plurality of images IM(1)-IM(6), and generates a composite image IMa of the measuring object W having a range which is wider than an imaging range of the imaging unit 12 by combining the plurality of images IM(1)-IM(6). The control unit 211 shifts the imaging unit 12 relatively with respect to the stage 3 such that parts of images IM(1)-IM(6) adjacent to one another obtained by the imaging unit 12 overlap, and performs an image matching processing that performs image matching of an overlapped portion RIM(1) -RIM(6) of the adj acent images IM(1)-IM(6). The control unit 211 generates the composite image IMa of the measuring object W by joining the adjacent images IM(1)-IM(6) at a position where the image matching is performed in the image matching processing.
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language eng ; fre ; ger
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subjects CALCULATING
COMPUTING
COUNTING
HANDLING RECORD CARRIERS
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
title Image processing device and method for image processing
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