Image processing device and method for image processing

A control unit 211 shifts an imaging unit 12 relatively with respect to a stage 3 to take an image IM(1)-IM(6) of a measuring object W at a plurality of places by the imaging unit 12 and thereby obtain a plurality of images IM(1)-IM(6), and generates a composite image IMa of the measuring object W h...

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Bibliographische Detailangaben
Hauptverfasser:	Kawazoe, Masaru, Ariga, Kozo
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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Beschreibung
Zusammenfassung:	A control unit 211 shifts an imaging unit 12 relatively with respect to a stage 3 to take an image IM(1)-IM(6) of a measuring object W at a plurality of places by the imaging unit 12 and thereby obtain a plurality of images IM(1)-IM(6), and generates a composite image IMa of the measuring object W having a range which is wider than an imaging range of the imaging unit 12 by combining the plurality of images IM(1)-IM(6). The control unit 211 shifts the imaging unit 12 relatively with respect to the stage 3 such that parts of images IM(1)-IM(6) adjacent to one another obtained by the imaging unit 12 overlap, and performs an image matching processing that performs image matching of an overlapped portion RIM(1) -RIM(6) of the adj acent images IM(1)-IM(6). The control unit 211 generates the composite image IMa of the measuring object W by joining the adjacent images IM(1)-IM(6) at a position where the image matching is performed in the image matching processing.