OPTOACOUSTIC INSPECTION DEVICE FOR INSPECTION OF SEMICONDUCTOR WAFERS

An inspection device is provided which comprises a receiving member defining an open cell for receiving a target therein. An optical excitation input is in optical communication with the cell for exciting the target. At least one acoustic pickup is in acoustic communication with the cell for picking...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DANIELS, Stephen, HAYDEN, Chanel Moira Pia, MCNALLY, Patrick
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspection device is provided which comprises a receiving member defining an open cell for receiving a target therein. An optical excitation input is in optical communication with the cell for exciting the target. At least one acoustic pickup is in acoustic communication with the cell for picking up acoustic energy resultant from excitation of the target. A recorder is provided for recording the acoustic energy picked up from the at least one acoustic pickup for facilitating structural analysis of the target.