METHOD FOR LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS

A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FOMENKOV, Igor, V, BROWN, Daniel, J.w, SANDSTROM, Richard, L, PARTLO, William, N
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!