METHOD FOR LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS

METHOD FOR LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS

A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FOMENKOV, Igor, V, BROWN, Daniel, J.w, SANDSTROM, Richard, L, PARTLO, William, N
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal; a laser source responsive to a trigger signal to produce a laser pulse; and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet.