SENSOR ELEMENT, METHOD OF MAKING THE SAME, AND SENSOR DEVICE INCLUDING THE SAME
A sensor element includes a first conductive electrode having a first conductive member electrically coupled thereto; an absorptive dielectric layer comprising a polymer of intrinsic microporosity; and a second conductive electrode having a second conductive member electrically coupled thereto. The...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A sensor element includes a first conductive electrode having a first conductive member electrically coupled thereto; an absorptive dielectric layer comprising a polymer of intrinsic microporosity; and a second conductive electrode having a second conductive member electrically coupled thereto. The second conductive electrode comprises at least one noble metal, has a thickness of from 4 to 10 nanometers and is permeable to at least one organic vapor. The absorptive dielectric layer is at least partially disposed between the first conductive electrode and the second conductive electrode. A method of making the sensor element, and sensor device containing it, are also disclosed. |
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