Integrated magnetic field sensor and method for measuring the position of a ferromagnetic workpiece with an integrated magnetic field sensor

The integrated magnetic field sensor (10) has a semiconductor body (30) with an upper surface and a rear surface. A surface (55) of a magnet (50) is formed perpendicular to a main extension surface of Hall sensor (40). A central axis (M) runs parallel to the main extension plane of the Hall sensor....

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1. Verfasser: Heberle, Klaus
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The integrated magnetic field sensor (10) has a semiconductor body (30) with an upper surface and a rear surface. A surface (55) of a magnet (50) is formed perpendicular to a main extension surface of Hall sensor (40). A central axis (M) runs parallel to the main extension plane of the Hall sensor. The central axis passes in a perpendicular manner through a standard (N) of the main extension surface. The standard stands in a centroid of the main extension surface. The field lines of the magnet run parallel to the main extension surface of the Hall sensor such that a Hall voltage is generated, when a part of the magnetic field lines is deflected by a ferromagnetic component (100) perpendicular to the main extension plane of the Hall sensor. An independent claim is included for a method for a determining a position of a ferromagnetic component.