Method of copper electroplating

A copper plating solution which contains compounds with the structure -X-S-Y-where X and Y are, independently of each other, atoms selected from a group consisting of hydrogen, carbon, sulfur, nitrogen, and oxygen, and X and Y can be the same only if they are carbon atoms and aliphatic semialdehydes...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hayashi, Shinjiro, Saito, Mutsuko, Sakai, Makoto
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A copper plating solution which contains compounds with the structure -X-S-Y-where X and Y are, independently of each other, atoms selected from a group consisting of hydrogen, carbon, sulfur, nitrogen, and oxygen, and X and Y can be the same only if they are carbon atoms and aliphatic semialdehydes. By using this copper electroplating solution it is possible to form good filled vias without worsening the appearance of the plating.