COMPOSITE SENSOR
A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being abl...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit configured to drive the first, second, third and fourth oscillators so as to oscillate the first and second oscillators in opposite phase to each other, and the third and fourth oscillators in opposite phase to each other, and so as to oscillate the first unit and the second unit in opposite phase to each other; and a detection unit configured to detect displacements of the first, second, third and fourth oscillators in the detecting direction. |
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