DISCRETE POLARIZATION SCATTEROMETRY

Systems and methods for discrete polarization scatterometry are provided.

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Bibliographische Detailangaben
Hauptverfasser:	SELIGSON, Joel, SVIZHER, Alexander, LEVINSKI, Vladimir, HILL, Andrew V, WANG, David Y, MANASSEN, Amnon, DE VEER, Johannes D, KANDEL, Daniel, ROTTER, Lawrence D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Systems and methods for discrete polarization scatterometry are provided.