Method of manufacturing an electromechanical transducer

Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer (2) is formed on a first substr...

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Bibliographische Detailangaben
Hauptverfasser:	Kato, Ayako, Torashima, Kazutoshi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer (2) is formed on a first substrate (1), a barrier wall (3) is formed by removing a part of the first insulating layer, and a second insulating layer (10) is formed on a region of the first substrate after the part of the first insulating layer has been removed. Next, a gap is formed by bonding a second substrate (18) on the barrier wall, and a vibration film (23) that is opposed to the second insulating layer via the gap is formed from the second substrate. In the forming of the barrier wall, a height on a gap side in a direction vertical to the first substrate becomes lower than a height of a center portion.