Device with MEMS pressure sensor and CMOS circuit and method of producing a device

Device with MEMS pressure sensor and CMOS circuit and method of producing a device

Various embodiments relate to a MEMS pressure sensor (100)including: a lower electrode (106); an upper electrode (114) over the lower electrode; an insulating layer between the lower and upper electrodes that forms a cavity (110) between the upper and lower electrodes; and a NONON pressure membrane...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Besling, Willem
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Various embodiments relate to a MEMS pressure sensor (100)including: a lower electrode (106); an upper electrode (114) over the lower electrode; an insulating layer between the lower and upper electrodes that forms a cavity (110) between the upper and lower electrodes; and a NONON pressure membrane (116) over the upper electrode.