Thin-film solar fabrication process, deposition method for TCO layer, and solar cell precursor layer stack

Thin-film solar fabrication process, deposition method for TCO layer, and solar cell precursor layer stack

Method of depositing a TCO layer on a substrate, of depositing precursors of a solar cell and precursors of a solar cell are described. The methods includes DC sputtering a ZnO-containing transparent conductive oxide layer over the substrate, the substrate having a size of 1.4 m 2 or above and textu...

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Hauptverfasser: SCHMIDT, URSULA INGEBORG, OBERMEYER, PHILIPP, SEVERIN , DANIEL, REMBECK, ANDREAS, KRESS, MARKUS, KUHR, NIELS, BUSCHBAUM, SUZANNE, STOEMMER, CHRISTIAN, SCHWANITZ, KONRAD, STOLLEY, TOBIAS, KURTHEN CHRISTOF, ROHDE, MARTIN, ZILBAUER,THOMAS WERNER, KLEIN, STEFAN, VERMEIR, INGE, SOMMER, ELISABETH
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:Method of depositing a TCO layer on a substrate, of depositing precursors of a solar cell and precursors of a solar cell are described. The methods includes DC sputtering a ZnO-containing transparent conductive oxide layer over the substrate, the substrate having a size of 1.4 m 2 or above and texturing the ZnO-containing transparent conductive oxide layer, wherein the textured ZnO-containing transparent conductive oxide layer has a root means square roughness of 60 nm or below.