Illumination optical apparatus and device manufacturing method
An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member...
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| creator | Hirota, Hiroyuki |
| description | An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member 22 is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP2515171A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP2515171A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP2515171A13</originalsourceid><addsrcrecordid>eNqNyjEOwjAMAMAsDKjwB3-AIaCKDQlVRWVjYK-sxAVLiWM1Du9n4QFMt9zWXe4ptcyCxkWgqHHABKiKK1qrgBIh0ocDQUZpCwZrK8sLMtm7xJ3bLJgq7X92Dm7jc5gOpGWmqhhIyObxcex978_-6k9_lC9IeTDD</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Illumination optical apparatus and device manufacturing method</title><source>esp@cenet</source><creator>Hirota, Hiroyuki</creator><creatorcontrib>Hirota, Hiroyuki</creatorcontrib><description>An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member 22 is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.</description><language>eng ; fre ; ger</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20121024&DB=EPODOC&CC=EP&NR=2515171A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20121024&DB=EPODOC&CC=EP&NR=2515171A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Hirota, Hiroyuki</creatorcontrib><title>Illumination optical apparatus and device manufacturing method</title><description>An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member 22 is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjEOwjAMAMAsDKjwB3-AIaCKDQlVRWVjYK-sxAVLiWM1Du9n4QFMt9zWXe4ptcyCxkWgqHHABKiKK1qrgBIh0ocDQUZpCwZrK8sLMtm7xJ3bLJgq7X92Dm7jc5gOpGWmqhhIyObxcex978_-6k9_lC9IeTDD</recordid><startdate>20121024</startdate><enddate>20121024</enddate><creator>Hirota, Hiroyuki</creator><scope>EVB</scope></search><sort><creationdate>20121024</creationdate><title>Illumination optical apparatus and device manufacturing method</title><author>Hirota, Hiroyuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2515171A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2012</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>Hirota, Hiroyuki</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hirota, Hiroyuki</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Illumination optical apparatus and device manufacturing method</title><date>2012-10-24</date><risdate>2012</risdate><abstract>An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member 22 is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | Illumination optical apparatus and device manufacturing method |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-22T12%3A23%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Hirota,%20Hiroyuki&rft.date=2012-10-24&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP2515171A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |