Illumination optical apparatus and device manufacturing method

An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member...

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Bibliographische Detailangaben
1. Verfasser:	Hirota, Hiroyuki
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An illumination optical apparatus 13 guides exposure light EL emitted from an exposure light source 12, to an illumination target object R. The illumination optical apparatus 13 has a plurality of spatial light modulation members 22 arranged in an array form, and each spatial light modulation member 22 is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.