TIME-OF-FLIGHT SPECTROMETRY AND SPECTROSCOPY OF SURFACES

TIME-OF-FLIGHT SPECTROMETRY AND SPECTROSCOPY OF SURFACES

Described is an analytical method and apparatus for counting and measuring the flight time of secondary electrons, secondary ions and neutrals, scattered ions and/or neutrals and for correlating coincidences between these while maintaining a continuous un-pulsed, micro-focused, primary particle beam...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCHULTZ, J., Albert, WATERS, Kelley, L, EGAN, Thomas, F, ULRICH, Steven, R
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Described is an analytical method and apparatus for counting and measuring the flight time of secondary electrons, secondary ions and neutrals, scattered ions and/or neutrals and for correlating coincidences between these while maintaining a continuous un-pulsed, micro-focused, primary particle beam for impinging a surface for purposes of microprobe imaging and microanalysis.