MICRO ELECTRO-MECHANICAL HEATER

A sub-micron scale nanomechanical property testing apparatus includes a test subject holder (55). The test subject holder (55) includes a base interface (53) configured to couple with a holder base (54) of a sub-micron nanomechanical property testing instrument and electro-mechanical transducer (32)...

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Bibliographische Detailangaben
Hauptverfasser:	ASIF, Syed Amanulla Syed, CYRANKOWSKI, Edward, WARREN, Oden, L, OH, Yunje
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A sub-micron scale nanomechanical property testing apparatus includes a test subject holder (55). The test subject holder (55) includes a base interface (53) configured to couple with a holder base (54) of a sub-micron nanomechanical property testing instrument and electro-mechanical transducer (32) assembly. The test subject holder (55) further includes a test subject stage (110) coupled with the base interface (53). The test subject stage (110) is thermally isolated from the base interface (53). The test subject stage (110) includes a stage subject surface (201) configured to receive a test subject (31), and a stage plate (112) bracing the stage subject surface (201). The stage plate (112) is under the stage subject surface (201). The test subject stage (110) further includes a heating element (202) adjacent to the stage subject surface (201), wherein the heating element (202) is configured to generate heat at the stage subject surface (201).