COUPLING DEVICES AND METHODS OF USING THEM

COUPLING DEVICES AND METHODS OF USING THEM

Certain embodiments described herein are directed to methods of using couplers to provide a seal between a source assembly and a vacuum chamber. In certain examples, the source assembly can be inserted into a vacuum chamber. In some examples, the source assembly can be sealed to the vacuum chamber b...

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1. Verfasser: FERRARA, KEITH
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
BLASTING
DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
THERMAL INSULATION IN GENERAL
WEAPONS
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creator FERRARA, KEITH
description Certain embodiments described herein are directed to methods of using couplers to provide a seal between a source assembly and a vacuum chamber. In certain examples, the source assembly can be inserted into a vacuum chamber. In some examples, the source assembly can be sealed to the vacuum chamber by rotation of a moveable component in a first direction to provide an axial force to seal the source assembly to the vacuum chamber. Rotation of the moveable component in a second direction can release the provided axial force to permit removal of the source assembly from the vacuum chamber.
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subjects BASIC ELECTRIC ELEMENTS
BLASTING
DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
THERMAL INSULATION IN GENERAL
WEAPONS
title COUPLING DEVICES AND METHODS OF USING THEM
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