COUPLING DEVICES AND METHODS OF USING THEM

Certain embodiments described herein are directed to methods of using couplers to provide a seal between a source assembly and a vacuum chamber. In certain examples, the source assembly can be inserted into a vacuum chamber. In some examples, the source assembly can be sealed to the vacuum chamber b...

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Bibliographische Detailangaben
1. Verfasser: FERRARA, KEITH
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Certain embodiments described herein are directed to methods of using couplers to provide a seal between a source assembly and a vacuum chamber. In certain examples, the source assembly can be inserted into a vacuum chamber. In some examples, the source assembly can be sealed to the vacuum chamber by rotation of a moveable component in a first direction to provide an axial force to seal the source assembly to the vacuum chamber. Rotation of the moveable component in a second direction can release the provided axial force to permit removal of the source assembly from the vacuum chamber.