Flexible probe

A probe for testing electric properties on a specific location of a test sample, comprises a supporting body defining opposite first and second parts constituting a flexible cantilever part being flexible in one direction and a base part, respectively. The cantilever part defines an outer planar sur...

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Bibliographische Detailangaben
Hauptverfasser: NIELSEN, FOLMER, PETERSEN, PETER R.E, HANSEN, JESPER ERDMAN
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A probe for testing electric properties on a specific location of a test sample, comprises a supporting body defining opposite first and second parts constituting a flexible cantilever part being flexible in one direction and a base part, respectively. The cantilever part defines an outer planar surface substantially perpendicular to the one direction, the base part being adapted for being fixated in a co-operating testing machine The probe further comprises at least one conductive probe arm in the cantilever part being positioned opposite the base part. The cantilever part defines opposite first and second regions, the second region being in contact with the base part, the first region defining first and second side surfaces, each of the first and second side surfaces defining a first angle with the outer planar surface, a first width defined between the first and the second side surfaces, the second region defining third and fourth side surfaces, each of the third and fourth side surfaces defining a second angle with the outer planar surface, a second width defined between the third and the fourth side surfaces, and the second width being equal to and/or smaller than the first width.