METHOD FOR PRODUCING A PLANAR MEMBRANE

Bibliographische Detailangaben

Hauptverfasser:	FOURNEL, FRANK, CONSTANCIAS, CHRISTOPHE, DALZOTTO, BERNARD, MORICEAU, HUBERT, POUTEAU, VALERIE, MICHALLON, PHILIPPE
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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