Linear motor and stage device
A linear motor 1 includes a field magnet 2 and an armature 3. The field magnet 2 includes a pair of field magnet yokes 4. Between the field magnet yokes 4, a first magnet row 6 is disposed including, along an X axis direction, a plurality of opposing pairs of X-axis permanent magnets 6a having diffe...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A linear motor 1 includes a field magnet 2 and an armature 3. The field magnet 2 includes a pair of field magnet yokes 4. Between the field magnet yokes 4, a first magnet row 6 is disposed including, along an X axis direction, a plurality of opposing pairs of X-axis permanent magnets 6a having different polarities. Between the field magnet yokes 4, a second magnet row 7 is disposed to a first side or a second side of the first magnet row 6 in a Y axis direction. The second magnet row 7 includes a pair of opposing Y-axis permanent magnets 7a having different polarities and forming a single row in the Y axis direction. The armature 3 includes a three-phase coil 11a opposite the first magnet row 6 and a single-phase coil 12 opposite the second magnet row 7. |
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