PROCESS FOR PRODUCTION OF CYCLIC SILANE COMPOUND AND/OR CYCLIC CARBOSILANE COMPOUND
The present invention relates to: a process for producing a cyclic silane compound, which comprises subjecting a chained polysilane to pyrolysis in the presence of an oxide of a transition metal belonging to Group 8 or Group 11 of the periodic table; and a process for producing a cyclic carbosilane...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The present invention relates to: a process for producing a cyclic silane compound, which comprises subjecting a chained polysilane to pyrolysis in the presence of an oxide of a transition metal belonging to Group 8 or Group 11 of the periodic table; and a process for producing a cyclic carbosilane compound, which comprises subjecting a chained polysilane to pyrolysis in the presence of a simple substance of a metal selected from the group consisting of transition metal elements and elements belonging to Groups 12 to 15 of the periodic table or a compound thereof. |
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