System and method with automatic adjustment function for measuring the thickness of substrates

A system for measuring the thickness of substrates in a vacuum chamber is provided. The system includes a sender (110) adapted to emit electromagnetic radiation and a receiver (120) including a multi-zone sensor (130) for detecting the electromagnetic radiation. The multi-zone sensor includes a firs...

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Bibliographische Detailangaben
1. Verfasser: LEIPNITZ, THOMAS
Format: Patent
Sprache:eng ; fre ; ger
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