System and method with automatic adjustment function for measuring the thickness of substrates

A system for measuring the thickness of substrates in a vacuum chamber is provided. The system includes a sender (110) adapted to emit electromagnetic radiation and a receiver (120) including a multi-zone sensor (130) for detecting the electromagnetic radiation. The multi-zone sensor includes a first detection zone (132) for measuring the thickness of the substrates and a second detection zone (134) adapted to generate a signal indicative of an alignment between the sender and the receiver. The system further includes an adjustment system (140) adapted to automatically adjust the sender and the receiver with respect to each other based on the signal. Further, a method for adjustment of a sender and a receiver relative to each other is provided.