BIAXIAL ROTATION RATE SENSOR

BIAXIAL ROTATION RATE SENSOR

A micromechanical rotation rate sensor, comprising at least one substrate, wherein the rotation rate sensor has at least a first and a second seismic mass which are coupled to one another by means of at least one coupling beam, and wherein the rotation rate sensor is embodied in such a way that it c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SIVARAMAN, Ramnath, GÜNTHNER, Stefan, SCHMID, Bernhard
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Beschreibung
Zusammenfassung:A micromechanical rotation rate sensor, comprising at least one substrate, wherein the rotation rate sensor has at least a first and a second seismic mass which are coupled to one another by means of at least one coupling beam, and wherein the rotation rate sensor is embodied in such a way that it can detect rotation rates about at least a first and a second sensitive axis, wherein each seismic mass is assigned at least one actuator unit with which the deflection behavior of the seismic mass can be influenced.