A SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID

A SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID

A method and a device permit scanned probe microscopes with a non-optical feedback mechanism (1.2), such as a tuning fork, to be used in air or in liquid. The embodiments of the invention require geometric construction of the scanning device that can incorporate the non-optical feedback mechanism in...

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Bibliographische Detailangaben
Hauptverfasser: FEDOSYEYEV, OLEG, KOMISSAR, ANATOLY, KOKOTOV, SOFIA, FISH, GALINA, KOKOTOV, MICHAEL, LEWIS, AARON, DEKHTER, RIMA, LEWIS, DAVID
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
MEASURING
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:A method and a device permit scanned probe microscopes with a non-optical feedback mechanism (1.2), such as a tuning fork, to be used in air or in liquid. The embodiments of the invention require geometric construction of the scanning device that can incorporate the non-optical feedback mechanism in a way that does not obstruct geometrically essentially any lens (1.3) from above or below and permits free access to the probe that is interacting with the sample. In one such embodiment, a scanner (1.1) in x, y and z can move the probe with a structure in which either the non-optical feedback mechanism is in the liquid or in the air and can use either a cantilevered or straight probe. The system can also be constructed with multiple independent scanned probe microscopy probes that can work in liquid and/or in air.