ORGANIC COMPOUND STEAM GENERATOR AND APPARATUS FOR PRODUCING ORGANIC THIN FILM

Provided is a technology with which a vapor of an organic compound generated in a generating chamber does not flow back into an inner connection pipe for feeding the organic compound into the generating chamber. An apparatus 1 for producing an organic thin film includes a storage chamber 31 in which...

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Bibliographische Detailangaben
Hauptverfasser:	NEGISHI, TOSHIO, HIRAIWA, HIDEYUKI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided is a technology with which a vapor of an organic compound generated in a generating chamber does not flow back into an inner connection pipe for feeding the organic compound into the generating chamber. An apparatus 1 for producing an organic thin film includes a storage chamber 31 in which an organic material is placed, a generating chamber 33 for generating a vapor of the organic material by heating the organic material, and a transporting device 32 for feeding the organic material inside the storage chamber 31 into the generating chamber 33. The transporting device 32 includes an outer connection pipe 37 for gas-tightly connecting an inner atmosphere of the storage chamber 31 and an inner atmosphere of the generating chamber 33, an inner connection pipe 38 arranged inside the outer connection pipe 37, made of quartz and constructed so as to move the organic material from the interior of the storage chamber 31 to an interior of the generating chamber 33, and a gas introduction opening 42 for introducing a gas into the inner connection pipe 38.