POLYCRYSTALLINE SILICON ROD AND DEVICE FOR PRODUCING SAME

[Problems] To provide a polycrystalline silicon rod used for the recharging in the FZ method or the CZ method, the straight body portions thereof assuming an easily transferable shape and excelling in transferability. [Means for Solution] The polycrystalline silicon rod is obtained by depositing and...

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Bibliographische Detailangaben
Hauptverfasser:	ODA, HIROYUKI, KOYANAGI, SHINICHIROU
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	[Problems] To provide a polycrystalline silicon rod used for the recharging in the FZ method or the CZ method, the straight body portions thereof assuming an easily transferable shape and excelling in transferability. [Means for Solution] The polycrystalline silicon rod is obtained by depositing and growing silicon, by the chemical vapor-phase deposition method, on a silicon core member which includes a pair of silicon rods erected on the electrodes and a bridging portion connecting the upper ends of the silicon rods, wherein the straight body portions of the silicon rod erected on the electrodes have a diameter profile in the lengthwise direction thereof, and a minimum diameter is adjusted to be 60 to 95% of a maximum diameter.