Method of processing of an object

A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning (103,105); determining a height difference between the surface of the object and a predetermined surface for each of plural of lo...

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Bibliographische Detailangaben
Hauptverfasser: Biberger, Josef, Steigerwald, Michael, Dönitz, Dietmar, Mathée, Hans, Pulwey, Ralph, Paluszynski, Jaroslaw
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning (103,105); determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons (107); determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations (113).