INTEGRATED CIRCUIT WITH SPURIOUS ACOUSTIC MODE SUPPRESSION AND METHOD OF MANUFACTURE THEREOF

An integrated circuit (IC) apparatus includes a substrate having opposed first and second major sides and one or more edges defining an outer periphery of the substrate. The substrate may be a semiconductor material. The IC apparatus may further include one or more transducers situated on the first...

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Bibliographische Detailangaben
Hauptverfasser: CHEN, JIE, OSSMAN, WILLIAM, SAVORD, BERNIE J, SOLOMON, ROD J
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:An integrated circuit (IC) apparatus includes a substrate having opposed first and second major sides and one or more edges defining an outer periphery of the substrate. The substrate may be a semiconductor material. The IC apparatus may further include one or more transducers situated on the first major side of the substrate; and an attenuation pattern formed in at least one of the second major side and one or more of the edges of the substrate.