MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE

Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.

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Bibliographische Detailangaben
Hauptverfasser: GAIDARZHY, Alexei, KUYPERS, Jan, H, CHEN, David, M, ZOLFAGHARKHANI, Guiti
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.