CATALYST CHEMICAL VAPOR DEPOSITION APPARATUS

[Object] To provide a catalytic chemical vapor deposition apparatus capable of prolonging the service life of a catalyst wire. [Solving Means] In a catalytic chemical vapor deposition apparatus (1) according to the present invention, a catalyst wire (6) including a tantalum wire and a boride layer f...

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Bibliographische Detailangaben
Hauptverfasser:	HASHIMOTO, MASANORI, ASARI, SHIN, OSONO, SHUJI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	[Object] To provide a catalytic chemical vapor deposition apparatus capable of prolonging the service life of a catalyst wire. [Solving Means] In a catalytic chemical vapor deposition apparatus (1) according to the present invention, a catalyst wire (6) including a tantalum wire and a boride layer formed on a surface of the tantalum wire is used. The boride of the metal tantalum (tantalum boride) is harder than the metal tantalum. Therefore, by using the tantalum wire having the boride layer formed on the surface thereof as a catalyst wire, it is possible to reduce thermal expansion of the catalyst wire, improve mechanical strength, and prolong the service life. Further, by performing energization heating of the catalyst wire (6) by continuous energization, it is further possible to prolong the service life of the catalyst wire (6).