Method for producing images of a specimen

The invention relates to a method for producing images of a specimen (4), more particularly an organic specimen. The method provides for introducing a specimen (4) into a specimen chamber of a particle-beam device, selecting a specific position on the surface (56) of the specimen (4), supplying a co...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAUSTEIN, ELKE, STEBLER, CAMILLE, BÜHLER, WOLFRAM, DÖMER, HOLGER
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The invention relates to a method for producing images of a specimen (4), more particularly an organic specimen. The method provides for introducing a specimen (4) into a specimen chamber of a particle-beam device, selecting a specific position on the surface (56) of the specimen (4), supplying a contrast-agent precursor (51) on the specific position on the surface (56) of the specimen (4), providing a particle beam (50) and/or a light beam (47), guiding the particle beam (50) and/or the light beam (47) onto the specific position on the surface (56), applying a contrast-agent layer (52) to the specific position on the surface (56) of the specimen (4) as a result of the interaction of the particle beam (50) and/or the light beam (47) with the contrast-agent precursor (51), leaving the contrast-agent layer (52) on the surface (56) of the specimen (4) for a predetermined amount of time, wherein, during the predetermined amount of time, a first part (53) of the contrast-agent layer (52) diffuses into the specimen (4) and wherein a second part (54) of the contrast-agent layer (52, 52A, 52B) remains on the surface (56) of the specimen (4), and imaging the specimen (4) by means of an optical device and/or a particle-optical device (1) and/or by means of the particle beam (50).