Air dust collector

Provided is a device capable of removing dust from a substrate surface with a simple and inexpensive configuration, and efficiently aspirating and disposing of the removed dust. The air dust collector is a device for removing dust from a substrate surface with air, having an air intake part (1) from...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HIRONO, YOSHIFUMI
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Provided is a device capable of removing dust from a substrate surface with a simple and inexpensive configuration, and efficiently aspirating and disposing of the removed dust. The air dust collector is a device for removing dust from a substrate surface with air, having an air intake part (1) from where air is introduced, an ejector part (2), and a discharge part (3). The ejector part (2) increases the flow rate of the air from the air intake part (1) and blows the air onto the substrate surface. The discharge part (3) aspirates and discharges the air that has been blown out from the ejector part (2), as well as ambient air. The air pressure at the substrate surface is made lower than the ambient atmospheric pressure by the ejector effect produced by the air flowing from the ejector part (2) to the discharge part (3).