METHOD FOR CONCAVE AND CONVEX PATTERN FORMATION AND APPARATUS FOR MANUFACTURING CONCAVE AND CONVEX PATTERN

The present invention provides a method for forming concave-convex pattern corresponding to a nanoimprint method which is advantageously utilized in the preparation of electronic devices, optical parts and recording media, and enabling the preparation of the product having the fine pattern mentioned...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KAIDA EIZOU, INAMIYA TAKATO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	The present invention provides a method for forming concave-convex pattern corresponding to a nanoimprint method which is advantageously utilized in the preparation of electronic devices, optical parts and recording media, and enabling the preparation of the product having the fine pattern mentioned above in cheapness and high speed. The method for forming a concave-convex pattern comprises of the steps: a step of placing and depressing a stamper having a fine concave-convex pattern surface thereon on a photo-curable transfer layer of a photo-curable transfer sheet to form a laminate; a step of exposing the photo-curable transfer layer of the laminate having the stamper to ultraviolet rays to cure the photo-curable transfer layer, and removing the stamper from the laminate to form the inverted fine concave-convex pattern on a surface of the photo-curable transfer layer; a step of placing and depressing the intermediate stamper on a photo-curable transfer layer of another photo-curable transfer sheet to form a laminate; and a step of exposing the photo-curable transfer layer of the laminate having the intermediate stamper to ultraviolet rays to cure the photo-curable transfer layer, and removing the intermediate stamper, whereby the photo-curable transfer sheet having the fine concave-convex pattern surface is obtained.