Liquid ejecting head and liquid ejecting apparatus
A liquid ejecting head including pressure generating chambers which communicate with nozzle openings, and a piezoelectric element which generates changes in pressure in the pressure generating chambers and which is provided with a first electrode, a piezoelectric layer which contains lead, zirconium...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A liquid ejecting head including pressure generating chambers which communicate with nozzle openings, and a piezoelectric element which generates changes in pressure in the pressure generating chambers and which is provided with a first electrode, a piezoelectric layer which contains lead, zirconium, and titanium, and is formed on the first electrode, a second electrode formed on the opposite side of the piezoelectric layer to the first electrode, wherein a groove portion, which exists between grains in the second electrode side surface of the piezoelectric layer, satisfies 0¤d/Á¤0.900 (where d: depth of groove, w: width of groove, p: radius of curvature (d 2 +w 2 /4)/2d). |
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